SEG 特用電子級氣體 Si2H6 Disilane 矽乙烷 (二矽烷) CAS NO.1590-87-0 Si3H8 Trisilane 矽丙烷 (三矽烷) CAS NO.7783-26-8 n-Si4H10 n-Tetrasilane 正矽丁烷 (四矽烷) CAS NO.7783-29-1 AHCl Hydrogen Chloride Anhydrous 無水氯化氫 CAS NO.7647-01-0 NF3 Nitrogen Trifluoride 三氟化氮 CAS NO.7783-54-2 PH3 Phosphane 磷化氫 (預計開發產品) CAS NO.7803-51-2 B2H6 Diborane 乙硼烷 (預計開發產品) CAS NO.19287-45-7 AsH3 Arsine 砷化氫 (預計開發產品) CAS NO.7784-42-1 GeH4 Germane 甲鍺烷 (預計開發產品) CAS NO.7782-65-2 F2/N2 Mixtures 氟&氮混合氣 (預計開發產品) CAS NO.7782-41-4